Focus ion beam (FIB) engraving performed by the Center of Optics, Photonics and Laser of Laval University (Quebec, Canada)

SiliCycle's logo engraved on a 11 μm silica sphere

Device : FEI Quanta 3D FEG
It's a "DualBeam" system: a Scanning Electron Microscope (SEM) coupled to a Focus Ion Beam (FIB)